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Chinese scientists achieve breakthrough in precision measurement

( english.jiading.gov.cn ) 2023-12-27

Chinese scientists at the Shanghai Institute of Microsystem and Information Technology, which is located in Jiading district, Shanghai, have recently made a breakthrough in precision measurement.

Led by Dr. Li Xinxin, the team developed the world's most sensitive "scale" using a cutting-edge microelectromechanical system (MEMS) process.

This technology achieves a mass resolution down to the sub-femtogram level (10^-13 grams), surpassing the sensitivity of existing thermal balances and quartz crystal microbalances.

The MEMS-based chip can detect even the slightest mass variations during cellular growth processes. The chip integrates resonant excitation devices, frequency readout circuits, and sample temperature control elements, allowing real-time measurement during rapid temperature changes. It can be mass-produced at a low cost, making it suitable for large-scale applications.


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